Gas-Source CVD Growth of Atomic Layered WS(2) from WF(6) and H(2)S Precursors with High Grain Size Uniformity

מאת Okada, Mitsuhiro, Okada, Naoya, Chang, Wen-Hsin, Endo, Takahiko, Ando, Atsushi, Shimizu, Tetsuo, Kubo, Toshitaka, Miyata, Yasumitsu, Irisawa, Toshifumi
הוצא לאור ב Sci Rep (2019)