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A Novel Measurement Method of Mechanical Properties for Individual Layers in Multilayered Thin Films

Various multilayered thin films are extensively used as the basic component of some micro-electro-mechanical systems, requiring an efficient measurement method for material parameters, such as Young’s modulus, residual stress, etc. This paper developed a novel measurement method to extract the Young...

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Detalhes bibliográficos
Publicado no:Micromachines (Basel)
Main Authors: Zhou, Zai-Fa, Meng, Mu-Zi, Sun, Chao, Huang, Qing-An
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2019
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6843387/
https://ncbi.nlm.nih.gov/pubmed/31581644
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10100669
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