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Optimization of the SiC Powder Source Material for Improved Process Conditions During PVT Growth of SiC Boules
We have studied the influence of different SiC powder size distributions and the sublimation behavior during physical vapor transport growth of SiC in a 75 mm and 100 mm crystal processing configuration. The evolution of the source material as well as of the crystal growth interface was carried out...
Shranjeno v:
| izdano v: | Materials (Basel) |
|---|---|
| Main Authors: | , , , , |
| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
MDPI
2019
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| Teme: | |
| Online dostop: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6803855/ https://ncbi.nlm.nih.gov/pubmed/31597332 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma12193272 |
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