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Suspended Graphene Membranes with Attached Silicon Proof Masses as Piezoresistive Nanoelectromechanical Systems Accelerometers
[Image: see text] Graphene is an atomically thin material that features unique electrical and mechanical properties, which makes it an extremely promising material for future nanoelectromechanical systems (NEMS). Recently, basic NEMS accelerometer functionality has been demonstrated by utilizing pie...
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| Wydane w: | Nano Lett |
|---|---|
| Główni autorzy: | , , , , , , , |
| Format: | Artigo |
| Język: | Inglês |
| Wydane: |
American Chemical Society
2019
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| Dostęp online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6791286/ https://ncbi.nlm.nih.gov/pubmed/31478660 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acs.nanolett.9b01759 |
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