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Suspended Graphene Membranes with Attached Silicon Proof Masses as Piezoresistive Nanoelectromechanical Systems Accelerometers
[Image: see text] Graphene is an atomically thin material that features unique electrical and mechanical properties, which makes it an extremely promising material for future nanoelectromechanical systems (NEMS). Recently, basic NEMS accelerometer functionality has been demonstrated by utilizing pie...
שמור ב:
| הוצא לאור ב: | Nano Lett |
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| Main Authors: | , , , , , , , |
| פורמט: | Artigo |
| שפה: | Inglês |
| יצא לאור: |
American Chemical Society
2019
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| גישה מקוונת: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6791286/ https://ncbi.nlm.nih.gov/pubmed/31478660 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acs.nanolett.9b01759 |
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