Mo-La(2)O(3) Multilayer Metallization Systems for High Temperature Surface Acoustic Wave Sensor Devices

Developing advanced thin film materials is the key challenge in high-temperature applications of surface acoustic wave sensor devices. One hundred nanometer thick (Mo-La [Formula: see text] O [Formula: see text]) multilayer systems were fabricated at room temperature on thermally oxidized (100) Si s...

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Bibliographic Details
Published in:Materials (Basel)
Main Authors: Menzel, Siegfried B., Seifert, Marietta, Priyadarshi, Abhinav, Rane, Gayatri K., Park, Eunmi, Oswald, Steffen, Gemming, Thomas
Format: Artigo
Language:Inglês
Published: MDPI 2019
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Article
Online Access:https://ncbi.nlm.nih.gov/pmc/articles/PMC6747606/
https://ncbi.nlm.nih.gov/pubmed/31438479
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma12172651
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