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A high efficiency silicon nitride waveguide grating coupler with a multilayer bottom reflector
We propose a high efficiency apodized grating coupler with a bottom reflector for silicon nitride photonic integrated circuits. The reflector consists of a stack of alternate silicon nitride and silicon dioxide quarter-wave films. The design, fabrication and optical characterization of the couplers...
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| Udgivet i: | Sci Rep |
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| Main Authors: | , , , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
Nature Publishing Group UK
2019
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| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6736935/ https://ncbi.nlm.nih.gov/pubmed/31506482 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-019-49324-5 |
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