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Translational MEMS Platform for Planar Optical Switching Fabrics
While 3-D microelectromechanical systems (MEMS) allow switching between a large number of ports in optical telecommunication networks, the development of such systems often suffers from design, fabrication and packaging constraints due to the complex structures, the wafer bonding processes involved,...
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Vydáno v: | Micromachines (Basel) |
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Hlavní autoři: | , , , , |
Médium: | Artigo |
Jazyk: | Inglês |
Vydáno: |
MDPI
2019
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Témata: | |
On-line přístup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6680699/ https://ncbi.nlm.nih.gov/pubmed/31262085 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10070435 |
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