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Translational MEMS Platform for Planar Optical Switching Fabrics

While 3-D microelectromechanical systems (MEMS) allow switching between a large number of ports in optical telecommunication networks, the development of such systems often suffers from design, fabrication and packaging constraints due to the complex structures, the wafer bonding processes involved,...

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Detalhes bibliográficos
Publicado no:Micromachines (Basel)
Main Authors: Sharma, Suraj, Kohli, Niharika, Brière, Jonathan, Ménard, Michaël, Nabki, Frederic
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2019
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6680699/
https://ncbi.nlm.nih.gov/pubmed/31262085
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10070435
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