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Translational MEMS Platform for Planar Optical Switching Fabrics

While 3-D microelectromechanical systems (MEMS) allow switching between a large number of ports in optical telecommunication networks, the development of such systems often suffers from design, fabrication and packaging constraints due to the complex structures, the wafer bonding processes involved,...

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Bibliografische gegevens
Gepubliceerd in:Micromachines (Basel)
Hoofdauteurs: Sharma, Suraj, Kohli, Niharika, Brière, Jonathan, Ménard, Michaël, Nabki, Frederic
Formaat: Artigo
Taal:Inglês
Gepubliceerd in: MDPI 2019
Onderwerpen:
Online toegang:https://ncbi.nlm.nih.gov/pmc/articles/PMC6680699/
https://ncbi.nlm.nih.gov/pubmed/31262085
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10070435
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