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Design and Fabrication of a Push-Pull Electrostatic Actuated Cantilever Waveguide Scanner
The paper presents a novel fully integrated MEMS-based non-resonating operated 2D mechanical scanning system using a 1D push-pull actuator. Details of the design, fabrication and tests performed are presented. The current design utilizes an integrated electrostatic push-pull actuator and a SU-8 rib...
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| Publicat a: | Micromachines (Basel) |
|---|---|
| Autors principals: | , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI
2019
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6680476/ https://ncbi.nlm.nih.gov/pubmed/31261955 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10070432 |
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