Lanean...
Design and Fabrication of a Push-Pull Electrostatic Actuated Cantilever Waveguide Scanner
The paper presents a novel fully integrated MEMS-based non-resonating operated 2D mechanical scanning system using a 1D push-pull actuator. Details of the design, fabrication and tests performed are presented. The current design utilizes an integrated electrostatic push-pull actuator and a SU-8 rib...
Gorde:
| Argitaratua izan da: | Micromachines (Basel) |
|---|---|
| Egile Nagusiak: | , , |
| Formatua: | Artigo |
| Hizkuntza: | Inglês |
| Argitaratua: |
MDPI
2019
|
| Gaiak: | |
| Sarrera elektronikoa: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6680476/ https://ncbi.nlm.nih.gov/pubmed/31261955 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10070432 |
| Etiketak: |
Etiketa erantsi
Etiketarik gabe, Izan zaitez lehena erregistro honi etiketa jartzen!
|