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A Review of the Capacitive MEMS for Seismology
MEMS (Micro Electro-Mechanical Systems) sensors enable a vast range of applications: among others, the use of MEMS accelerometers for seismology related applications has been emerging considerably in the last decade. In this paper, we provide a comprehensive review of the capacitive MEMS acceleromet...
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| Publicado en: | Sensors (Basel) |
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| Main Authors: | , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
MDPI
2019
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6679216/ https://ncbi.nlm.nih.gov/pubmed/31336990 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19143093 |
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