Development of a new hybrid approach combining AFM and SEM for the nanoparticle dimensional metrology

At this time, there is no instrument capable of measuring a nano-object along the three spatial dimensions with a controlled uncertainty. The combination of several instruments is thus necessary to metrologically characterize the dimensional properties of a nano-object. This paper proposes a new app...

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Detalhes bibliográficos
Publicado no:Beilstein J Nanotechnol
Main Authors: Crouzier, Loïc, Delvallée, Alexandra, Ducourtieux, Sébastien, Devoille, Laurent, Noircler, Guillaume, Ulysse, Christian, Taché, Olivier, Barruet, Elodie, Tromas, Christophe, Feltin, Nicolas
Formato: Artigo
Idioma:Inglês
Publicado em: Beilstein-Institut 2019
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Full Research Paper
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6664400/
https://ncbi.nlm.nih.gov/pubmed/31431864
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3762/bjnano.10.150
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