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Sol–Gel PMMA–ZrO(2) Hybrid Layers as Gate Dielectric for Low-Temperature ZnO-Based Thin-Film Transistors
[Image: see text] We report a simple sol–gel process for the deposition of poly(methyl methacrylate) (PMMA)–ZrO(2) organic–inorganic hybrid films at low temperature and studied their properties as a function of the molar ratios of the precursors in the hybrid sol–gel solution, which included zirconi...
Shranjeno v:
| izdano v: | ACS Omega |
|---|---|
| Main Authors: | , , , , |
| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
American Chemical Society
2017
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| Online dostop: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6645328/ https://ncbi.nlm.nih.gov/pubmed/31457280 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acsomega.7b00552 |
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