Sol–Gel PMMA–ZrO(2) Hybrid Layers as Gate Dielectric for Low-Temperature ZnO-Based Thin-Film Transistors

[Image: see text] We report a simple sol–gel process for the deposition of poly(methyl methacrylate) (PMMA)–ZrO(2) organic–inorganic hybrid films at low temperature and studied their properties as a function of the molar ratios of the precursors in the hybrid sol–gel solution, which included zirconi...

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Bibliographic Details
Published in:ACS Omega
Main Authors: Alvarado-Beltrán, Clemente G., Almaral-Sánchez, Jorge L., Mejia, Israel, Quevedo-López, Manuel A., Ramirez-Bon, Rafael
Format: Artigo
Language:Inglês
Published: American Chemical Society 2017
Online Access:https://ncbi.nlm.nih.gov/pmc/articles/PMC6645328/
https://ncbi.nlm.nih.gov/pubmed/31457280
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acsomega.7b00552
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