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Ge nanoparticles in SiO(2) for near infrared photodetectors with high performance

In this work we prepared films of amorphous germanium nanoparticles embedded in SiO(2) deposited by magnetron sputtering on Si and quartz heated substrates at 300, 400 and 500 °C. Structure, morphology, optical, electrical and photoconduction properties of all films were investigated. The Ge concent...

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Enregistré dans:
Détails bibliographiques
Publié dans:Sci Rep
Auteurs principaux: Stavarache, Ionel, Teodorescu, Valentin Serban, Prepelita, Petronela, Logofatu, Constantin, Ciurea, Magdalena Lidia
Format: Artigo
Langue:Inglês
Publié: Nature Publishing Group UK 2019
Sujets:
Accès en ligne:https://ncbi.nlm.nih.gov/pmc/articles/PMC6635504/
https://ncbi.nlm.nih.gov/pubmed/31312003
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-019-46711-w
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