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A New Design of an MOEMS Gyroscope Based on a WGM Microdisk Resonator
In this paper, we present a new design for a micro-opto-electro-mechanical (MOEMS) gyroscope based on a whispering-gallery mode (WGM) microdisk resonator and MEMS resonator. The mechanical characteristics, frequency split, and quality factor (Q) of the MEMS resonator; the optical characteristics, Q...
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| Udgivet i: | Sensors (Basel) |
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| Main Authors: | , , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
MDPI
2019
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| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6631629/ https://ncbi.nlm.nih.gov/pubmed/31234467 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19122798 |
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