Loading...
Flow sensor based on the snap-through detection of a curved micromechanical beam
We report on a flow velocity measurement technique based on snap-through detection of an electrostatically actuated, bistable micromechanical beam. We show that induced elecro-thermal Joule heating and the convective air cooling change the beam curvature and consequently the critical snap-through vo...
Na minha lista:
| Udgivet i: | J Microelectromech Syst |
|---|---|
| Main Authors: | , , , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
2018
|
| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6604643/ https://ncbi.nlm.nih.gov/pubmed/31274970 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/JMEMS.2018.2868776 |
| Tags: |
Tilføj Tag
Ingen Tags, Vær først til at tagge denne postø!
|