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Flow sensor based on the snap-through detection of a curved micromechanical beam
We report on a flow velocity measurement technique based on snap-through detection of an electrostatically actuated, bistable micromechanical beam. We show that induced elecro-thermal Joule heating and the convective air cooling change the beam curvature and consequently the critical snap-through vo...
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| Veröffentlicht in: | J Microelectromech Syst |
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| Hauptverfasser: | , , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
2018
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6604643/ https://ncbi.nlm.nih.gov/pubmed/31274970 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/JMEMS.2018.2868776 |
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