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Exploiting Direct Laser Writing for Hydrogel Integration into Fragile Microelectromechanical Systems

The integration of chemo-responsive hydrogels into fragile microelectromechanical systems (MEMS) with reflective surfaces in the micron to submicron range is presented. Direct laser writing (DLW) for 3D microstructuring of chemoresponsive “smart” hydrogels on sensitive microstructures is demonstrate...

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Détails bibliographiques
Publié dans:Sensors (Basel)
Auteurs principaux: Menges, Julian, Klingel, Steffen, Oesterschulze, Egbert, Bart, Hans-Jörg
Format: Artigo
Langue:Inglês
Publié: MDPI 2019
Sujets:
Accès en ligne:https://ncbi.nlm.nih.gov/pmc/articles/PMC6603525/
https://ncbi.nlm.nih.gov/pubmed/31159238
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19112494
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