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Exploiting Direct Laser Writing for Hydrogel Integration into Fragile Microelectromechanical Systems

The integration of chemo-responsive hydrogels into fragile microelectromechanical systems (MEMS) with reflective surfaces in the micron to submicron range is presented. Direct laser writing (DLW) for 3D microstructuring of chemoresponsive “smart” hydrogels on sensitive microstructures is demonstrate...

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Detalhes bibliográficos
Publicado no:Sensors (Basel)
Main Authors: Menges, Julian, Klingel, Steffen, Oesterschulze, Egbert, Bart, Hans-Jörg
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2019
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6603525/
https://ncbi.nlm.nih.gov/pubmed/31159238
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19112494
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