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Precise Layer Control of MoTe(2) by Ozone Treatment
Transition metal dichalcogenides (TMDCs) demonstrate great potential in numerous applications. However, these applications require a precise control of layer thickness at the atomic scale. In this work, we present an in-situ study of the self-limiting oxidation process in MoTe(2) by ozone (O(3)) tre...
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| Publicado en: | Nanomaterials (Basel) |
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| Main Authors: | , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
MDPI
2019
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6567192/ https://ncbi.nlm.nih.gov/pubmed/31108879 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/nano9050756 |
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