Fabrication of Diamond Submicron Lenses and Cylinders by ICP Etching Technique with SiO(2) Balls Mask

Submicron lenses and cylinders exhibiting excellent properties in photodetector and quantum applications have been fabricated on a diamond surface by an inductively-coupled plasma (ICP) etching technique. During ICP etching, a layer containing 500 nm diameter balls of SiO(2) was employed as mask. By...

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Vydáno v:Materials (Basel)
Hlavní autoři: Liu, Zongchen, Zhu, Tian-Fei, Wang, Yan-Feng, Ahmed, Irfan, Liu, Zhangcheng, Wen, Feng, Zhang, Xiaofan, Wang, Wei, Fan, Shuwei, Wang, Kaiyue, Wang, Hong-Xing
Médium: Artigo
Jazyk:Inglês
Vydáno: MDPI 2019
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On-line přístup:https://ncbi.nlm.nih.gov/pmc/articles/PMC6566194/
https://ncbi.nlm.nih.gov/pubmed/31108881
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma12101622
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