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Fabrication of Diamond Submicron Lenses and Cylinders by ICP Etching Technique with SiO(2) Balls Mask
Submicron lenses and cylinders exhibiting excellent properties in photodetector and quantum applications have been fabricated on a diamond surface by an inductively-coupled plasma (ICP) etching technique. During ICP etching, a layer containing 500 nm diameter balls of SiO(2) was employed as mask. By...
Αποθηκεύτηκε σε:
| Τόπος έκδοσης: | Materials (Basel) |
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| Κύριοι συγγραφείς: | , , , , , , , , , , |
| Μορφή: | Artigo |
| Γλώσσα: | Inglês |
| Έκδοση: |
MDPI
2019
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| Θέματα: | |
| Διαθέσιμο Online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6566194/ https://ncbi.nlm.nih.gov/pubmed/31108881 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma12101622 |
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