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Concentric Split Aluminum with Silicon-Aluminum Nitride Annular Rings Resonators
This paper presents a novel approach of annular concentric split rings microelectromechanical resonators with tether configuration to reduce anchor loss and gives very high-quality factor (Q) 2.97 Million based on FEA (Finite Element Analysis) simulation. The operating frequencies of these resonator...
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| Publicado no: | Micromachines (Basel) |
|---|---|
| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2019
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6562899/ https://ncbi.nlm.nih.gov/pubmed/31052249 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10050296 |
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