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Graphene–aluminum nitride NEMS resonant infrared detector

The use of micro-/nanoelectromechanical resonators for the room temperature detection of electromagnetic radiation at infrared frequencies has recently been investigated, showing thermal detection capabilities that could potentially outperform conventional microbolometers. The scaling of the device...

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Detalhes bibliográficos
Publicado no:Microsyst Nanoeng
Main Authors: Qian, Zhenyun, Hui, Yu, Liu, Fangze, Kang, Sungho, Kar, Swastik, Rinaldi, Matteo
Formato: Artigo
Idioma:Inglês
Publicado em: Nature Publishing Group 2016
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6444720/
https://ncbi.nlm.nih.gov/pubmed/31057826
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/micronano.2016.26
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