Realization of wafer-scale nanogratings with sub-50 nm period through vacancy epitaxy

Gratings, one of the most important energy dispersive devices, are the fundamental building blocks for the majority of optical and optoelectronic systems. The grating period is the key parameter that limits the dispersion and resolution of the system. With the rapid development of large X-ray scienc...

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Veröffentlicht in:Nat Commun
Hauptverfasser: Huang, Qiushi, jia, Qi, Feng, Jiangtao, Huang, Hao, Yang, Xiaowei, Grenzer, Joerg, Huang, Kai, Zhang, Shibing, Lin, Jiajie, Zhou, Hongyan, You, Tiangui, Yu, Wenjie, Facsko, Stefan, Jonnard, Philippe, Wu, Meiyi, Giglia, Angelo, Zhang, Zhong, Liu, Zhi, Wang, Zhanshan, Wang, Xi, Ou, Xin
Format: Artigo
Sprache:Inglês
Veröffentlicht: Nature Publishing Group UK 2019
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Article
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC6547753/
https://ncbi.nlm.nih.gov/pubmed/31164646
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41467-019-10095-2
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