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Realization of wafer-scale nanogratings with sub-50 nm period through vacancy epitaxy

Gratings, one of the most important energy dispersive devices, are the fundamental building blocks for the majority of optical and optoelectronic systems. The grating period is the key parameter that limits the dispersion and resolution of the system. With the rapid development of large X-ray scienc...

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Detalhes bibliográficos
Publicado no:Nat Commun
Main Authors: Huang, Qiushi, jia, Qi, Feng, Jiangtao, Huang, Hao, Yang, Xiaowei, Grenzer, Joerg, Huang, Kai, Zhang, Shibing, Lin, Jiajie, Zhou, Hongyan, You, Tiangui, Yu, Wenjie, Facsko, Stefan, Jonnard, Philippe, Wu, Meiyi, Giglia, Angelo, Zhang, Zhong, Liu, Zhi, Wang, Zhanshan, Wang, Xi, Ou, Xin
Formato: Artigo
Idioma:Inglês
Publicado em: Nature Publishing Group UK 2019
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6547753/
https://ncbi.nlm.nih.gov/pubmed/31164646
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41467-019-10095-2
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