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Enhanced Humidity Sensing Response of SnO(2)/Silicon Nanopillar Array by UV Irradiation
In this work, a silicon nanopillar array was created with nanosphere lithography. SnO(2) film was deposited on this nanostructure by magnetron sputtering to form an SnO(2)/silicon nanopillar array sensor. The humidity sensitivity, response time, and recovery time were all measured at room temperatur...
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| Publicado en: | Sensors (Basel) |
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| Autores principales: | , , , , , , |
| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
MDPI
2019
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| Materias: | |
| Acceso en línea: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6539979/ https://ncbi.nlm.nih.gov/pubmed/31075817 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19092141 |
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