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A Decoupling Design with T-Shape Structure for the Aluminum Nitride Gyroscope
This paper reports a novel design for the decoupling of microelectromechanical systems (MEMS) gyroscopes. The MEMS gyroscope is based on piezoelectric aluminum nitride (AlN) film, and the main structure is a mass hung by T-shape beams. A pair of parallel drive electrodes are symmetrically placed on...
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| Udgivet i: | Micromachines (Basel) |
|---|---|
| Main Authors: | , , , , , , , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
MDPI
2019
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| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6523559/ https://ncbi.nlm.nih.gov/pubmed/31013854 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10040244 |
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