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Estimation of Air Damping in Out-of-Plane Comb-Drive Actuators

The development of new compliant resonant microsystems and the trend towards further miniaturization have recently raised the issue of the accuracy and reliability of computational tools for the estimation of fluid damping. Focusing on electrostatically actuated torsional micro-mirrors, a major diss...

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Bibliografiske detaljer
Udgivet i:Micromachines (Basel)
Main Authors: Mirzazadeh, Ramin, Mariani, Stefano
Format: Artigo
Sprog:Inglês
Udgivet: MDPI 2019
Fag:
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC6523271/
https://ncbi.nlm.nih.gov/pubmed/31010138
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10040263
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