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Estimation of Air Damping in Out-of-Plane Comb-Drive Actuators

The development of new compliant resonant microsystems and the trend towards further miniaturization have recently raised the issue of the accuracy and reliability of computational tools for the estimation of fluid damping. Focusing on electrostatically actuated torsional micro-mirrors, a major diss...

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Detalhes bibliográficos
Publicado no:Micromachines (Basel)
Main Authors: Mirzazadeh, Ramin, Mariani, Stefano
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2019
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6523271/
https://ncbi.nlm.nih.gov/pubmed/31010138
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10040263
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