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Estimation of Air Damping in Out-of-Plane Comb-Drive Actuators
The development of new compliant resonant microsystems and the trend towards further miniaturization have recently raised the issue of the accuracy and reliability of computational tools for the estimation of fluid damping. Focusing on electrostatically actuated torsional micro-mirrors, a major diss...
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| Pubblicato in: | Micromachines (Basel) |
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| Autori principali: | , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI
2019
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6523271/ https://ncbi.nlm.nih.gov/pubmed/31010138 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10040263 |
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