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The Investigation of High-Temperature SAW Oxygen Sensor Based on ZnO Films
In this paper, a wireless oxygen sensor based on a surface acoustic wave (SAW) was reported. For high-temperature applications, novel Al(2)O(3)/ZnO/Pt multilayered conductive film was deposited on langasite substrate as the electrodes, and ZnO film obtained by the pulse laser deposition (PLD) method...
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| Publicat a: | Materials (Basel) |
|---|---|
| Autors principals: | , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI
2019
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6515368/ https://ncbi.nlm.nih.gov/pubmed/30991737 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma12081235 |
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