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Simulation of SAW Humidity Sensors Based on [Formula: see text] ZnO/R-Sapphire Structures
The characteristics of two types of surface acoustic waves SAWs (Rayleigh waves and Love waves) propagating in bilayered structures of [Formula: see text] ZnO/R-sapphire are simulated by a finite element method (FEM) model, in which both SAWs have crossed propagation directions. Furthermore, based o...
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| Publicado no: | Sensors (Basel) |
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| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2016
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5134427/ https://ncbi.nlm.nih.gov/pubmed/27827856 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s16111112 |
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