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Recommended practice for calibrating vacuum gauges of the ionization type
This article represents a recommended practice for the calibration of ionization gauges using the comparison method. In this method, ionization gauges are compared to a working standard that has an SI traceable calibration. The ionization gauge is either of the hot-cathode ionization type or the col...
Gardado en:
| Publicado en: | J Vac Sci Technol A |
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| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
2018
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6513016/ https://ncbi.nlm.nih.gov/pubmed/31092970 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1116/1.5025060 |
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