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Vacuum Furnace for Degassing Stainless-Steel Vacuum Components
Ultra-high vacuum systems must often be constructed of materials with ultra-low outgassing rates to achieve pressure of 10(−6) Pa and below. Any component placed into the ultra-high vacuum system must also be constructed of materials with ultra-low outgassing rates. Baking stainless steel vacuum com...
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| Publicado no: | J Vac Sci Technol A |
|---|---|
| Main Authors: | , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2018
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5986099/ https://ncbi.nlm.nih.gov/pubmed/29881141 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1116/1.5016181 |
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