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Investigations of medium-temperature heat treatments to achieve low outgassing rates in stainless steel ultrahigh vacuum chambers
The authors investigated the outgassing rates and fluxes of vacuum chambers constructed from common 304L stainless steel vacuum components and subjected to heat treatments. Our goal was to obtain H(2) outgassing flux on the order of 10(−11) Pa l s(−1)cm(−2) or better from standard stainless steel va...
Shranjeno v:
| izdano v: | J Vac Sci Technol A |
|---|---|
| Main Authors: | , , |
| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
2017
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| Teme: | |
| Online dostop: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5705090/ https://ncbi.nlm.nih.gov/pubmed/29200610 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1116/1.4983211 |
| Oznake: |
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