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High-Sensitivity and Long-Life Microchannel Plate Processed by Atomic Layer Deposition
As a key component of electron multiplier device, a microchannel plate (MCP) can be applied in many scientific fields. Pure aluminum oxide (Al(2)O(3)) as secondary electron emission (SEE) layer were deposited in the pores of MCP via atomic layer deposition (ALD) to overcome problems such as high dar...
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| Publicado no: | Nanoscale Res Lett |
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| Main Authors: | , , , , , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer US
2019
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6502932/ https://ncbi.nlm.nih.gov/pubmed/31062184 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-019-2983-1 |
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