טוען...
Analysis of a Hybrid Micro-Electro-Mechanical Sensor Based on Graphene Oxide/Polyvinyl Alcohol for Humidity Measurements †
In this paper, we present a redundant microsensor based on the bulk and etch silicon‑on‑insulator (BESOI) process for measuring relative humidity (RH), by using a graphene‑oxide/polyvinyl‑alcohol (GO/PVA) composite. The MEMS is a mechanical oscillator, composed of a proof mass with multilayer of nan...
שמור ב:
| הוצא לאור ב: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , |
| פורמט: | Artigo |
| שפה: | Inglês |
| יצא לאור: |
MDPI
2019
|
| נושאים: | |
| גישה מקוונת: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6479286/ https://ncbi.nlm.nih.gov/pubmed/30974875 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19071720 |
| תגים: |
הוספת תג
אין תגיות, היה/י הראשונ/ה לתייג את הרשומה!
|