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Analysis of a Hybrid Micro-Electro-Mechanical Sensor Based on Graphene Oxide/Polyvinyl Alcohol for Humidity Measurements †
In this paper, we present a redundant microsensor based on the bulk and etch silicon‑on‑insulator (BESOI) process for measuring relative humidity (RH), by using a graphene‑oxide/polyvinyl‑alcohol (GO/PVA) composite. The MEMS is a mechanical oscillator, composed of a proof mass with multilayer of nan...
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| Pubblicato in: | Sensors (Basel) |
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| Autori principali: | , , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI
2019
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6479286/ https://ncbi.nlm.nih.gov/pubmed/30974875 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19071720 |
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