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Temperature-Insensitive Structure Design of Micromachined Resonant Accelerometers

Micromachined resonant accelerometers (MRAs), especially those devices fabricated by silicon on glass technology, suffer from temperature drift error caused by inherent thermal stress. This paper proposes two structure designs to attenuate the effect of thermal stress. The first MRA structure is rea...

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Dettagli Bibliografici
Pubblicato in:Sensors (Basel)
Autori principali: Yin, Yonggang, Fang, Zhengxiang, Liu, Yunfeng, Han, Fengtian
Natura: Artigo
Lingua:Inglês
Pubblicazione: MDPI 2019
Soggetti:
Accesso online:https://ncbi.nlm.nih.gov/pmc/articles/PMC6479284/
https://ncbi.nlm.nih.gov/pubmed/30935015
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19071544
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