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Temperature-Insensitive Structure Design of Micromachined Resonant Accelerometers
Micromachined resonant accelerometers (MRAs), especially those devices fabricated by silicon on glass technology, suffer from temperature drift error caused by inherent thermal stress. This paper proposes two structure designs to attenuate the effect of thermal stress. The first MRA structure is rea...
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| Pubblicato in: | Sensors (Basel) |
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| Autori principali: | , , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI
2019
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6479284/ https://ncbi.nlm.nih.gov/pubmed/30935015 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19071544 |
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