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Temperature-Insensitive Structure Design of Micromachined Resonant Accelerometers
Micromachined resonant accelerometers (MRAs), especially those devices fabricated by silicon on glass technology, suffer from temperature drift error caused by inherent thermal stress. This paper proposes two structure designs to attenuate the effect of thermal stress. The first MRA structure is rea...
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| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2019
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6479284/ https://ncbi.nlm.nih.gov/pubmed/30935015 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19071544 |
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