Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm

During the past decade, piezo-resistive cantilever type silicon microprobes for high-speed roughness measurements inside high-aspect-ratio microstructures, like injection nozzles or critical gas nozzles have been developed. This article summarizes their metrological properties for fast roughness and...

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Bibliografski detalji
Izdano u:Sensors (Basel)
Glavni autori: Brand, Uwe, Xu, Min, Doering, Lutz, Langfahl-Klabes, Jannick, Behle, Heinrich, Bütefisch, Sebastian, Ahbe, Thomas, Peiner, Erwin, Völlmeke, Stefan, Frank, Thomas, Mickan, Bodo, Kiselev, Ilia, Hauptmannl, Michael, Drexel, Michael
Format: Artigo
Jezik:Inglês
Izdano: MDPI 2019
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Article
Online pristup:https://ncbi.nlm.nih.gov/pmc/articles/PMC6471719/
https://ncbi.nlm.nih.gov/pubmed/30909410
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19061410
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