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Investigating the Trackability of Silicon Microprobes in High-Speed Surface Measurements

High-speed tactile roughness measurements set high demand on the trackability of the stylus probe. Because of the features of low mass, low probing force, and high signal linearity, the piezoresistive silicon microprobe is a hopeful candidate for high-speed roughness measurements. This paper investi...

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Detalhes bibliográficos
Publicado no:Sensors (Basel)
Main Authors: Xu, Min, Li, Zhi, Fahrbach, Michael, Peiner, Erwin, Brand, Uwe
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2021
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC7956422/
https://ncbi.nlm.nih.gov/pubmed/33668104
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s21051557
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