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Vertical, capacitive microelectromechanical switches produced via direct writing of copper wires

Three-dimensional (3D) direct writing based on the meniscus-confined electrodeposition of copper metal wires was used in this study to develop vertical capacitive microelectromechanical switches. Vertical microelectromechanical switches reduce the form factor and increase the area density of such de...

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Detalhes bibliográficos
Publicado no:Microsyst Nanoeng
Main Authors: Yi, Zhiran, Guo, Jianjun, Chen, Yining, Zhang, Haiqing, Zhang, Shuai, Xu, Gaojie, Yu, Minfeng, Cui, Ping
Formato: Artigo
Idioma:Inglês
Publicado em: Nature Publishing Group 2016
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6444713/
https://ncbi.nlm.nih.gov/pubmed/31057818
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/micronano.2016.10
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