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Evaluation of Hazardous Chemicals with Material Safety Data Sheet and By-products of a Photoresist Used in the Semiconductor-Manufacturing Industry

BACKGROUND: The photolithography process in the semiconductor industry uses various chemicals with little information on their constitution. This study aimed to identify the chemical constituents of photoresist (PR) products and their by-products and to compare these constituents with material safet...

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Bibliografiske detaljer
Udgivet i:Saf Health Work
Main Authors: Jang, Miyeon, Yoon, Chungsik, Park, Jihoon, Kwon, Ohhun
Format: Artigo
Sprog:Inglês
Udgivet: Occupational Safety and Health Research Institute 2019
Fag:
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC6428989/
https://ncbi.nlm.nih.gov/pubmed/30949390
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.shaw.2018.08.001
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