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Evaluation of Hazardous Chemicals with Material Safety Data Sheet and By-products of a Photoresist Used in the Semiconductor-Manufacturing Industry
BACKGROUND: The photolithography process in the semiconductor industry uses various chemicals with little information on their constitution. This study aimed to identify the chemical constituents of photoresist (PR) products and their by-products and to compare these constituents with material safet...
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| 出版年: | Saf Health Work |
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| 主要な著者: | , , , |
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
Occupational Safety and Health Research Institute
2019
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6428989/ https://ncbi.nlm.nih.gov/pubmed/30949390 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.shaw.2018.08.001 |
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