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Luminescence from Si-Implanted SiO(2)-Si(3)N(4) Nano Bi-Layers for Electrophotonic Integrated Si Light Sources
In this paper, we present structural and luminescence studies of silicon-rich silicon oxide (SRO) and SRO-Si [Formula: see text] N [Formula: see text] bi-layers for integration in emitter-waveguide pairs that can be used for photonic lab-on-a-chip sensing applications. The results from bi and mono l...
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| Veröffentlicht in: | Sensors (Basel) |
|---|---|
| Hauptverfasser: | , , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI
2019
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6412257/ https://ncbi.nlm.nih.gov/pubmed/30791460 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19040865 |
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