Synthesis and characterization of single-phase epitaxial Cr(2)N thin films by reactive magnetron sputtering

Cr(2)N is commonly found as a minority phase or inclusion in stainless steel, CrN-based hard coatings, etc. However, studies on phase-pure material for characterization of fundamental properties are limited. Here, Cr(2)N thin films were deposited by reactive magnetron sputtering onto (0001) sapphire...

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Detalhes bibliográficos
Publicado no:J Mater Sci
Main Authors: Gharavi, M. A., Greczynski, G., Eriksson, F., Lu, J., Balke, B., Fournier, D., le Febvrier, A., Pallier, C., Eklund, P.
Formato: Artigo
Idioma:Inglês
Publicado em: Springer US 2018
Assuntos:
Electronic Materials
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6411273/
https://ncbi.nlm.nih.gov/pubmed/30930478
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1007/s10853-018-2914-z
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