Time-resolved grazing-incidence pair distribution functions during deposition by radio-frequency magnetron sputtering

Characterization of local order in thin films is challenging with pair distribution function (PDF) analysis because of the minute mass of the scattering material. Here, it is demonstrated that reliable high-energy grazing-incidence total X-ray scattering data can be obtained in situ during thin-film...

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Detalhes bibliográficos
Publicado no:IUCrJ
Main Authors: Roelsgaard, Martin, Dippel, Ann-Christin, Borup, Kasper Andersen, Nielsen, Ida Gjerlevsen, Broge, Nils Lau Nyborg, Röh, Jan Torben, Gutowski, Olof, Iversen, Bo Brummerstedt
Formato: Artigo
Idioma:Inglês
Publicado em: International Union of Crystallography 2019
Assuntos:
Research Papers
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6400190/
https://ncbi.nlm.nih.gov/pubmed/30867927
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1107/S2052252519001192
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