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Time-resolved grazing-incidence pair distribution functions during deposition by radio-frequency magnetron sputtering
Characterization of local order in thin films is challenging with pair distribution function (PDF) analysis because of the minute mass of the scattering material. Here, it is demonstrated that reliable high-energy grazing-incidence total X-ray scattering data can be obtained in situ during thin-film...
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| 出版年: | IUCrJ |
|---|---|
| 主要な著者: | , , , , , , , |
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
International Union of Crystallography
2019
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6400190/ https://ncbi.nlm.nih.gov/pubmed/30867927 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1107/S2052252519001192 |
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