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Humidity Sensors with Shielding Electrode Under Interdigitated Electrode
Recently, humidity sensors have been investigated extensively due to their broad applications in chip fabrication, health care, agriculture, amongst others. We propose a capacitive humidity sensor with a shielding electrode under the interdigitated electrode (SIDE) based on polyimide (PI). Thanks to...
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| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2019
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6386973/ https://ncbi.nlm.nih.gov/pubmed/30736294 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19030659 |
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