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Microstructure and Oxidation Behavior of Metal V Films Deposited by Magnetron Sputtering

Direct-current magnetron sputtering (DCMS) was applied to prepare vanadium (V) films on Si substrate. The influence of substrate temperature (T(s)) and target–substrate distance (D(t–s)) on phase structure and surface morphology of V films were investigated by X-ray diffraction (XRD), scanning elect...

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Опубликовано в: :Materials (Basel)
Главные авторы: Zhang, Song, Wang, Tingting, Zhang, Ziyu, Li, Jun, Tu, Rong, Shen, Qiang, Wang, Chuanbin, Luo, Guoqiang, Zhang, Lianmeng
Формат: Artigo
Язык:Inglês
Опубликовано: MDPI 2019
Предметы:
Online-ссылка:https://ncbi.nlm.nih.gov/pmc/articles/PMC6384545/
https://ncbi.nlm.nih.gov/pubmed/30704091
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma12030425
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